福州大学学报（自然科学版）2011，Vol.39Issue(1)：143-147,5.DOI:CNKI:35-1117/N.20110126.1718.000
基于镀膜玻璃微流控芯片制作工艺的研究
Study on fabrication technology of microfiuidic chip with coated glass
摘要
Abstract
This paper describes a fabrication technology of microfluidic chip by spin - coating photoresist on metal film coated glass. The fabrication steps, including smearing, spin -coating, pre -baking, exposure, development and rebaking, were optimized to increase the ability of corrosion -resistance for photoresist layer. The optimization made fabrication technology stable. The channel in microfluidic chip could get 36μn depth, 150μm width and 150mm length. The glass microfluidic chip showed good performance. The development of fabrication technology saved the cost of microchip fabrication and improved the flexibility in microfluidic chip fabrication and diversity in pattern design.关键词
微流控芯片/光刻胶/镀膜玻璃Key words
microfluidic chip/ photoresist/ coated glass分类
化学化工引用本文复制引用
王伟,王宗文,蔡建南..基于镀膜玻璃微流控芯片制作工艺的研究[J].福州大学学报（自然科学版）,2011,39(1):143-147,5.基金项目
国家自然科学基金资助项目(20805007) （20805007）
福建省自然科学基金资助项目(2010J01034) （2010J01034）
