光学精密工程2011，Vol.19Issue(1)：56-63,8.DOI:10.3788/OPE.20111901.0056
制作平面全息光栅的离轴抛物镜/洛埃镜干涉系统
Off-axis parabolic/Lloyd mirror interferometric systems formanufacturing plane holographic gratings
摘要
Abstract
The design and manufacturing of interferometric exposure systems with high wave-front flatness and structural stability is a paramount condition for development of high-quality holographic diffraction gratings. A ray-tracing was carried out on straightness of the interference fringes arisen from four kinds of interferometric exposure systems of Single Reflective Mirrors (SLR),namely, offaxis parabolic/Lloyd mirror system, single lens/Lloyd mirror system, spherical mirror/Lloyd mirror system and the separation of pairs of lens/Lloyd mirror system. A standard grating was placed in the interferometric field to make two parallel light beams for exposure incident on the grating, so that the diffractive light was superpositioned to appear Moire fringes. Then, the Moire fringes metioned above were simulated. The Zernike polynomial was used to fit the Moire fringes to get wavefront aberration of interferometric exposure systems and to compare the differrences among the four systems. The results show that the off-axis parabolic/Lloyd mirror system is the most appropriate in production of small-caliber plane holographic gratings. On that basis, the off-axis parabolic/Lloyd mirror interferometric exposure system was manufactured to fabricate plane holographic gratings with a maximum size of 110 mm× 110 mm and the engraved linear density greater than 12001/mm. The diffraction grating wave-front aberration produced by the plane holographic grating is 0. 239 6λ (λ = 550 nm) ,as the mirror face accuracy aberration between off-axis parabolic mirror and Lloyd mirror is λ/8 (λ = 632.8nm). This system can be used to produce plane holographic gratings with wave-front aberration in λ/6-λ/7(λ=550 nm), if the external disturbance is overcome and finely tuned.关键词
平面全息光栅/离轴抛物镜/洛埃镜/干涉系统Key words
plane holographic grating/ off-axis parabolic mirror/ Lloyd mirror/ interference system分类
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巴音贺希格,邵先秀,崔继承,李文昊,齐向东..制作平面全息光栅的离轴抛物镜/洛埃镜干涉系统[J].光学精密工程,2011,19(1):56-63,8.基金项目
国家自然科学基金资助项目(No.60478043) （No.60478043）
"十一五"国家科技支撑计划重大项目(No.2006BAK03A02) （No.2006BAK03A02）
国家创新方法工作专项项目(No.2008IM040700) （No.2008IM040700）
国家重大科研装备研制项目(No.ZBYZ2008-1) （No.ZBYZ2008-1）
中国科学院重大科研装备研制项目(No.YZ200804) （No.YZ200804）
吉林省科技发展计划资助项目(No.20070523、No.20086013) （No.20070523、No.20086013）
长春市应用技术研究计划项目(No.08YJ07) （No.08YJ07）
