信息与电子工程2011，Vol.9Issue(1)：96-100,5.
MEMS永磁振动发电机的设计、制作和测试
Design,fabrication and performance test of a micromachined permanent magnet vibration-based power generator
摘要
Abstract
This paper presents a permanent magnet vibration-based power generator based on Micro Electro Mechanical Systems(MEMS) technology. It can scavenge vibration energy and convert it into electrical power. It includes a fixed micro coil and a movable permanent magnet attached on a nickel planar spring integrated with silicon frame. The two-layer copper micro coil and nickel planar spring on silicon are fabricated using bulk-silicon micromachining and microelectroplating technique. Two prototypes with different coils and same magnet-spring system are assembled and tested. Prototype A can generate maximal load voltage of 51 mV and load power of 5.89 μW at 222 Hz resonant frequency and 9.8 m/s2 acceleration. At the resonant frequency of 247 Hz, prototype B generates maximum load voltage of 62 mV and load power of 6.4 μW for acceleration of 9.8 m/s2. The coil's area of 6.25 mm2 in prototype B is only 28％ of that of 22.56 mm2 in prototype A, however, the load voltage and load power are increased by 21.6％ and 86％, respectively. The analysis about the difference of output performance of two prototypes is also given in this paper.关键词
微机电系统/振动发电机/永磁/微加工技术/铜线圈/镍弹簧分类
信息技术与安全科学引用本文复制引用
王佩红,赵小林,戴旭涵,汪忠柱..MEMS永磁振动发电机的设计、制作和测试[J].信息与电子工程,2011,9(1):96-100,5.基金项目
国家自然科学基金资助项目(51007001和50977056) （51007001和50977056）
