中国机械工程2011，Vol.22Issue(1)：118-125,8.
CVD金刚石膜抛光技术综述
Review of Polishing Technology of CVD Diamond Films
摘要
Abstract
The principles of various polishing CVD diamond films at home and abroad in recent years were summarized and their advantages and disadvantages were also analyzed. The polishing technology of CVD diamond films mainly included mechanical polishing, chemical-assisted mechanical polishing, eletro-discharge machining polishing, high energy polishing and so on. Meanwhile, the problems to solve urgently in the future about polishing CVD diamond films were proposed and the trend of polishing CVD diamond films was forecasted.关键词
化学气相沉积/金刚石膜/抛光技术/表面粗糙度分类
信息技术与安全科学引用本文复制引用
焦可如,黄树涛,周丽,许立福..CVD金刚石膜抛光技术综述[J].中国机械工程,2011,22(1):118-125,8.基金项目
国家自然科学基金资助项目(50675142) （50675142）
