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Electrical and optical properties of deep ultraviolet transparent conductive Ga2O3/ITO films by magnetron sputtering

Liu Jianjun Yan Jinliang Shi Liang Li Ting

半导体学报2010，Vol.31Issue(10)：5-9,5.

半导体学报2010，Vol.31Issue(10)：5-9,5.DOI:10.1088/1674-4926/31/10/103001

Electrical and optical properties of deep ultraviolet transparent conductive Ga2O3/ITO films by magnetron sputtering

Liu Jianjun ¹Yan Jinliang ¹Shi Liang ¹Li Ting¹

作者信息

1. School of Physics, Ludong University, Yantai 264025, China
折叠

摘要

关键词

transparent conductive film/deep ultraviolet/gallium oxide/indium tin oxide

Key words

transparent conductive film/deep ultraviolet/gallium oxide/indium tin oxide

引用本文复制引用

Liu Jianjun,Yan Jinliang,Shi Liang,Li Ting..Electrical and optical properties of deep ultraviolet transparent conductive Ga2O3/ITO films by magnetron sputtering[J].半导体学报,2010,31(10):5-9,5.

基金项目

Project supported by the National Natural Science Foundation of China (No. 10974077), the Shandong Province Natural Science Foundation of China (No. ZR2009GM035), and the Shandong Province Higher Educational Science and Technology Program (No. J10LA08). （No. 10974077）

半导体学报

OA北大核心CSCDCSTPCDEI

ISSN：1674-4926

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