首页|期刊导航|半导体学报|Supercritical carbon dioxide process for releasing stuck cantilever beams

Supercritical carbon dioxide process for releasing stuck cantilever beams

Hui Yu Gao Chaoqun Wang Lei Jing Yupeng

半导体学报2010，Vol.31Issue(10)：126-129,4.

半导体学报2010，Vol.31Issue(10)：126-129,4.DOI:10.1088/1674-4926/31/10/106001

Hui Yu ¹Gao Chaoqun ¹Wang Lei ¹Jing Yupeng¹

作者信息

1. Integrated Circuit Advanced Process Center,Institute of Microelectronics,Chinese Academy of Sciences,Beijing,100029,China
折叠

SCCO2/sticking effect/release/cantilever beam/MEMS

SCCO2/sticking effect/release/cantilever beam/MEMS

Hui Yu,Gao Chaoqun,Wang Lei,Jing Yupeng..Supercritical carbon dioxide process for releasing stuck cantilever beams[J].半导体学报,2010,31(10):126-129,4.

Project supported by the National Natural Science Foundation of China(No.60976017). （No.60976017）

OA北大核心CSCDCSTPCDEI

ISSN：1674-4926

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