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MEMS magnetic field sensor based on silicon bridge structure

Du Guangtao Chen Xiangdong Lin Qibin Li Hui Guo Huihui

半导体学报2010，Vol.31Issue(10)：68-73,6.

半导体学报2010，Vol.31Issue(10)：68-73,6.DOI:10.1088/1674-4926/31/10/104011

Du Guangtao ¹Chen Xiangdong ¹Lin Qibin ¹Li Hui ¹Guo Huihui¹

作者信息

1. School of Information Science and Technology, Southwest Jiaotong University, Chengdu 610031, China
折叠

silicon bridge/magnetic field sensor/ferromagnetic magnet/ANSYS simulation/magnetic pressure/MEMS

silicon bridge/magnetic field sensor/ferromagnetic magnet/ANSYS simulation/magnetic pressure/MEMS

Du Guangtao,Chen Xiangdong,Lin Qibin,Li Hui,Guo Huihui..MEMS magnetic field sensor based on silicon bridge structure[J].半导体学报,2010,31(10):68-73,6.

Project supported by the National Natural Science Foundation of China (No. 60871024). （No. 60871024）

OA北大核心CSCDCSTPCDEI

ISSN：1674-4926

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