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Effect of ammonium molybdate concentration on chemical mechanical polishing of glass substrate

Zhang Zefang Liu Weili Song Zhitang

半导体学报2010，Vol.31Issue(11)：136-139,4.

半导体学报2010，Vol.31Issue(11)：136-139,4.DOI:10.1088/1674-4926/31/11/116003

Effect of ammonium molybdate concentration on chemical mechanical polishing of glass substrate

Zhang Zefang ¹Liu Weili ²Song Zhitang¹

作者信息

1. State Key Laboratory of Functional Materials for Informatics,Laboratory of Nanotechnology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai,200050,China
2. Shanghai Xinanna Electronic Technology Co.,Ltd.,Shangh
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摘要

关键词

ammonium molybdate/chemical mechanical polishing/glass substrate/coefficient of friction

Key words

ammonium molybdate/chemical mechanical polishing/glass substrate/coefficient of friction

引用本文复制引用

Zhang Zefang,Liu Weili,Song Zhitang..Effect of ammonium molybdate concentration on chemical mechanical polishing of glass substrate[J].半导体学报,2010,31(11):136-139,4.

基金项目

Project supported by the National Integrated Circuit Research Program of China(No.2009ZX02030-001),the Science and Technology Council of Shanghai,China(Nos.08111100300,08111100303,0952nm00200),the Shanghai Rising Star Program of China (No.07QH14017),the National Basic Research Program of China(Nos.2007CB935400,2010CB934300,2006CB302700),and the National High Technology Research and Development Program of China(No.2008AA031402). （No.2009ZX02030-001）

半导体学报

OA北大核心CSCDCSTPCDEI

ISSN：1674-4926

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