传感技术学报2011，Vol.24Issue(1)：41-45,5.DOI:10.3969/j.issn.1004-1699.2011.01.009
谐振敏感元件特性模拟器的研究
Research on the Characteristic Simulator for the Resonators*
摘要
Abstract
To implement the direct checked of the resonant silicon microstructure sensor integrated testing instrument,and optimize the reactive controlling circuit of resonant sensor, a circuit with resonator Characteristics was designed, the resontor is detected piezoresistively. The Characteristics of piezoresistively, which is the crux of the circuit,was achieved by analog circuit. Linear voltage_controlled resistor was obtained. A feedback compensation technology that can be used to expand the frequency bandwidth of this analog circuit was presented, so the frequency response was improved. Experiment results demonstrate that the equivalent output impedance/resistor is controlled by the input voltage, which means the successful simulation of the resonator.关键词
谐振式传感器/硅微机械/压阻拾振/模拟器/压控电阻/硅微传感器Key words
resonant sensor/ silicon micromaehining/ piezoresistive/ simulator/ voltage-controlled resistance分类
信息技术与安全科学引用本文复制引用
邢维巍,杜艳,樊尚春..谐振敏感元件特性模拟器的研究[J].传感技术学报,2011,24(1):41-45,5.基金项目
国家自然科学基金谐振式硅微结构传感器综合测试分析仪器资助(60927005) （60927005）
国家自然科学基金微机械谐振子激励检测方法及阻尼控制研究资助(60804062) （60804062）
