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A signal processing method for the friction-based endpoint detection system of a CMP process

Xu Chi Guo Dongming Jin Zhuji Kang Renke

半导体学报2010，Vol.31Issue(12)：138-142,5.

半导体学报2010，Vol.31Issue(12)：138-142,5.DOI:10.1088/1674-4926/31/12/126002

A signal processing method for the friction-based endpoint detection system of a CMP process

Xu Chi ¹Guo Dongming ¹Jin Zhuji ¹Kang Renke¹

作者信息

1. Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024,China
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摘要

关键词

CMP/endpoint detection/signal processing

Key words

CMP/endpoint detection/signal processing

引用本文复制引用

Xu Chi,Guo Dongming,Jin Zhuji,Kang Renke..A signal processing method for the friction-based endpoint detection system of a CMP process[J].半导体学报,2010,31(12):138-142,5.

基金项目

Project supported by the Major Program of National Natural Science Foundation of China(No.50390061)and the National Science and Technology Major Project,China(No.2009ZX02011). （No.50390061）

半导体学报

OA北大核心CSCDCSTPCDEI

ISSN：1674-4926

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