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基于等效面积法的线宽及线宽粗糙度测量

李洪波赵学增赵维谦

计量学报2011，Vol.32Issue(1)：16-19,4.

计量学报2011，Vol.32Issue(1)：16-19,4.DOI:10.3969/j.issn.1000-1158.2011.01.04

基于等效面积法的线宽及线宽粗糙度测量

Measurement of Line-width and Line-width Roughness Based on Equivalent Area

李洪波 ¹赵学增 ²赵维谦³

作者信息

1. 北京理工大学光电学院,北京,100001
2. 中国航空工业集团公司长城计量测试技术研究所,北京,100095
3. 哈尔滨工业大学机电工程学院,黑龙江,哈尔滨,150001
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摘要

Abstract

A method to measure line-width and line-width roughness (LWR) is presented based on the outline feature of the step scanned by AFM.Ideally, the step cross-section along the direction of the line-width is rectangle, whose area, S, is the product of height and line-width.Actually, the outline of the step cross-section is polygonal, whose area, S1, is equaled to S.The height of the profile scanned by AFM, H, is calculated by improving Tsai' s height algorithm.So, linewith, We, is calculated according to S1 and H.LWR is also calculated according to its definition as the 3σ value of linewidth variation.

关键词

计量学/原子力显微镜/线宽/线宽粗糙度/等效面积

Key words

Metrology/ Atomic force microscope/ Linewidth/ Linewidth roughness/ Equivalent area

分类

通用工业技术

引用本文复制引用

李洪波,赵学增,赵维谦..基于等效面积法的线宽及线宽粗糙度测量[J].计量学报,2011,32(1):16-19,4.

计量学报

OA北大核心CSCDCSTPCD

ISSN：1000-1158

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