深圳大学学报（理工版）2011，Vol.28Issue(1)：17-22,6.
基于F-P干涉的强度型光纤压力传感器
An optical fiber pressure sensor based on F-P interferometry and intensity demodulation
摘要
Abstract
An optical fiber pressure sensor was designed, fabricated and characterized. It employed a Fabry-Perot (F-P) interferometer and simple intensity-demodulation technology. A square silicon cup processed by anisotropic etching serves as sensitive element for the better consistency than that of circular diaphragm. A large area ratio of the moving mirror to the stationary one is introduced to reduce the nonlinearity due to the non-planarity of the deflection. Reference light generated from a 2 × 2 optical fiber coupler is used to decrease the influence of intensity variations of the light source. Single-value measurement was achieved under the pressure range from 0 to 38 kPa. The experimental results demonstrate an upmost relative sensitivity of 0. 7％/kPa and a reasonable repeatability, consisting well with the theoretical analysis and simulation. A new method of multi-wave or multi-sensor is presented to expand the measurement range with high sensitivity.关键词
传感器技术/光纤光学/压力测量/微机电系统/Fabry-Perot干涉/方形硅膜/强度调制分类
信息技术与安全科学引用本文复制引用
邓元龙,赵小丽,李学金,耿优福,洪学明,邱成军..基于F-P干涉的强度型光纤压力传感器[J].深圳大学学报（理工版）,2011,28(1):17-22,6.基金项目
国家自然科学基金资助项目(60978041) （60978041）
深圳市基础研究资助项目(JC200903130271A) （JC200903130271A）
