液晶与显示2011，Vol.26Issue(1)：23-27,5.DOI:10.3788/YJYXS20112601.0023
TFT-LCD取向层表面的针孔缺陷分析
Analysis of Pinhol Defects on Alignment Layer Surface for TFT-LCD
黄东升 1赵凯 1夏子祺 1王威 1张志男1
作者信息
- 1. 北京京东方光电科技有限公司,北京100176
- 折叠
摘要
Abstract
The pinholes on the surface of alignment layer was studied, which formed during the TFT-LCD manufacturing process and caused defects of the products. Herein, a vitally typical defect, black spot, was analyzed via FIB, SEM and ()MS. The analysis results of sta-tistical software BO (Business Objects) show that the pinhole is the main cause of the black spot. Based on theoretical analysis and further experimental results, it is found that the hy-drodynamic instability of the solution may lead to the pinholes on the alignment layer sur-face, and the pre-cure time of the alignment film solution is significantly responsible for hy-drodynamic instability. It is noteworthy that the instability needs times to grow full enough and then to influence the film structure. Therefore, the pinholes on the alignment layer sur-face will be reduced or eliminated if the pre-cure time is less than or equal to that time.关键词
TFT-LCD/取向/针孔/预烘/缺陷分析/流体力学不稳定性Key words
TFT-LCD/alignment/pinhole/pre-cure/failure analysis/hydrodynamic instability分类
信息技术与安全科学引用本文复制引用
黄东升,赵凯,夏子祺,王威,张志男..TFT-LCD取向层表面的针孔缺陷分析 [J].液晶与显示,2011,26(1):23-27,5.
