半导体学报2011，Vol.32Issue(2)：61-64,4.DOI:10.1088/1674-4926/32/2/024009
Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface*
Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface*
摘要
Abstract
Low resistance and thermally stable n-type contacts to N-polar GaN are essentially important for vertical light emitting diodes (VLEDs). The electrical characteristics of VLEDs with n-type contacts on a roughened and flat N-polar surface have been compared. VLEDs with contacts deposited on a roughened surface exhibit lower leakage currents yet a higher operating voltage. Based on this, a new scheme by depositing metallization contacts on a selectively wet-etching roughened surface has been developed. Excellent electrical and optical characteristics have been achieved with this method. An aging test further confirmed its stability.关键词
metallization contacts/ wet etching/ surface roughening/ polarizationKey words
metallization contacts/ wet etching/ surface roughening/ polarization引用本文复制引用
Wang Liancheng,Guo Enqing,Liu Zhiqiang,Yi Xiaoyan,Wang Guohong..Electrical characteristics of a vertical light emitting diode with n-type contacts on a selectively wet-etching roughened surface*[J].半导体学报,2011,32(2):61-64,4.基金项目
Project supported by the Knowledge Innovation Program of ISCAS (No.08S4060000). （No.08S4060000）
