半导体学报2011，Vol.32Issue(2)：65-68,4.DOI:10.1088/1674-4926/32/2/024010
16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides*
16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides*
摘要
Abstract
A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the device has channel spacing of 1.6 nm and crosstalk of 31 dB. The device is fabricated by 193 nm deep UV lithography in silicon-on-substrate. The demultiplexing characteristics are observed with erosstalk of 5-8 dB, central channel's insertion loss of 2.2 dB, free spectral range of 24.7 nm and average channel spacing of 1.475 nm. The cause of the spectral distortion is analyzed specifically.关键词
integrated optics/ arrayed waveguide grating/ Si nanowire waveguidesKey words
integrated optics/ arrayed waveguide grating/ Si nanowire waveguides引用本文复制引用
Zhao Lei,An Junming,Zhang Jiashun,Song Shijiao,Wu Yuanda,Hu Xiongwei..16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides*[J].半导体学报,2011,32(2):65-68,4.基金项目
Project supported by the National High Technology Research and Development Program of China (No.2006AA03Z420) and the National Natural Science Foundation of China (Nos.60776057,60837001,60776057). （No.2006AA03Z420）
