西华大学学报（自然科学版）2011，Vol.30Issue(3)：53-56,4.
掺铝氧化锌复合粉体制备工艺对靶材性能的影响
Effect of Synthesis Parameters of Al-ZnO Composite Powders on the Properties of Ceramic Targets
刘磊 1张勤勇 1金应荣 1王鹏飞1
作者信息
- 1. 西华大学材料科学与工程学院,四川成都,610039
- 折叠
摘要
Abstract
In this study, Al-ZnO composite ceramic powders were synthesized by sol-gel route, and taking Zn( NO3 )2 · 6H2O and Al( NO3 )3 · 9H2O as precursors and citric acid as complexing agent, Al-ZnO ceramic targets were prepared by ordinary sintering method.The results indicate that the targets have the optimal value of relative density and resistivity when the molar ratio of citric acid to metal ions is 2:1, the pH value is about 7.2 and the drying temperature is 90 ℃.The targets prepared by sol-gel route have better composition uniformity and properties than by solid reaction method.关键词
溶胶-凝胶法/AZO陶瓷靶材/合成工艺Key words
Sol-Gel/ Al-ZnO ceramic target/ synthesis parameter分类
通用工业技术引用本文复制引用
刘磊,张勤勇,金应荣,王鹏飞..掺铝氧化锌复合粉体制备工艺对靶材性能的影响[J].西华大学学报（自然科学版）,2011,30(3):53-56,4.
