传感技术学报2011，Vol.24Issue(5)：653-657,5.DOI:10.3969/j.issn.1004-1699.2011.05.006
基于MEMS技术的低g值微惯性开关的设计与制作
Design and Fabrication of Low-g Micro Inertial Switch Based on MEMS Technology *
摘要
Abstract
The micro inertial switch is a kind of inertial device sensitive to the acceleartion and achieving the switch closure when subjects to the applied accelearation. A low-g( lgn ～ 30gn )micro inertial switch based on the planar rectangular helical spring was developed. The structure of the switch is the classical spring-mass-damping system. The inertial sensing element containing a sensor mass and two springs was analyzed utilizing the ANSYS finite element method. The micro inertial switch was fabricated using the MEMS bulk micromachining process and packaged in wafer level, including the crucial technology of KOH etching、ICP etching spray coating method, and so on. The bulk of chip is about 7 mm×7 mm× 1.5 mm in size. The threshold value is about 4.28gn, and the on-state resistance is about 9.3 f by laboratory centrifuge test. It is shown that the closed precision of the micro inertial switch is about 0.5gn and the repeatability in multiple tests is good. The advantages of the switch are small size, simple structure and easy fabrication.关键词
平面矩形螺旋梁/微惯性开关/低g值开关/微机电系统(MEMS)Key words
planar rectangular helical spring/ micro inertial switch/ low-gn switch/ micro-electro-mechanical-system(MEMS)分类
通用工业技术引用本文复制引用
王超,陈光焱,吴嘉丽..基于MEMS技术的低g值微惯性开关的设计与制作[J].传感技术学报,2011,24(5):653-657,5.基金项目
中国工程物理研究院科学技术发展基金项目(2009B0403044) （2009B0403044）
