传感技术学报2011，Vol.24Issue(5)：675-678,4.DOI:10.3969/j.issn.1004-1699.2011.05.010
高灵敏压力传感器过载保护结构设计
Overload Protection Design of High-Sensitivity Pressure Sensor*
摘要
Abstract
In microelectromechanical systems( MEMS), the pressure sensor made by the sacrificial layer technique has advantages such as small chip size and high sensitivity, which nevertheless results in the difficulty to increase the overload ability. Thus,the stress distribution on the elastic thin film of the sacrificial layer piezoresistive pressure sensor was simulated and analyzed by the finite-element analysis using both static linear and nonlinear contact methods. Through the combination of these two methods, the stress distribution was simulated accurately under the state of overload. Based on the analysis results, a structural design method was proposed, which can increase the overload ability to about 180％ ～220％.关键词
压力传感器/牺牲层技术/过载保护/非线性接触Key words
pressure sensor/ sacrificial layer technology/ overload protection/ nonlinear contact分类
机械制造引用本文复制引用
揣荣岩,孙瑞,刘晓为,王健..高灵敏压力传感器过载保护结构设计[J].传感技术学报,2011,24(5):675-678,4.基金项目
国家自然科学基金项目(60776049) （60776049）
辽宁省教育厅创新团队项目(2007T130) （2007T130）
