传感技术学报2011，Vol.24Issue(5)：684-687,4.DOI:10.3969/j.issn.1004-1699.2011.05.012
环境温度对集成微沟道温差空气流量传感器的影响及其补偿
The Effects and Compensation of Ambient Temperature on an Air Flow Sensor Integrated Micro Channel
摘要
Abstract
The effect of ambient temperature on an air flow sensor integrated micro channel is studied, and a compensation solution of ambient temperature is proposed. For this flow sensor, the air flow velocity is obtained by testing temperature difference of upstream and downstream, and the temperature difference is different when ambient temperature is different. This can bring test bias. The increase of ambient temperature would cause the temperature difference of upstream and downstream decrease and output voltage decrease, but measurable range becomes wider.In this article, the compensation solution is that a film resistance used to test ambient temperature is installed in the upstream of chip. By this way the ambient temperature can transfer into voltage signal as the reference of compensation. The compensation solution is aimed to let the temperature difference of ambient and heater resistance maintain constant, meanwhile the measure deviation caused by ambient temperature change would decrease. When the air flow velocity is 2.5 m/s and ambient temperature is 0 ℃, 27 ℃ and 50 ℃, the output voltage signal is 4.5 V ,3.6 V and 2.4 V respectively before compensation,after compensation the output voltage signal is 3.62 V,3.68 V and 3.75 V respectively.关键词
空气流量传感器/环境温度/测试影响/补偿Key words
air flow sensor/ ambient temperature/ test effect/ compensation分类
信息技术与安全科学引用本文复制引用
余柏林,王瑞春,龚汉东,余法红..环境温度对集成微沟道温差空气流量传感器的影响及其补偿[J].传感技术学报,2011,24(5):684-687,4.基金项目
广东省自然科学基金项目(2010B010800013) （2010B010800013）
深圳市科技计划项目(JC201006040889A) （JC201006040889A）
