强激光与粒子束2011，Vol.23Issue(5)：1281-1284,4.DOI:10.3788/HPLPB20112305.1281
RB-SiC表面改性Si涂层的制备与性能
Preparation and performance of Si coating on RB-SiC mirror for surface modification
摘要
Abstract
In order to manufacture reaction bonded silicon carbide(RB-SiC) mirrors of fine optical surface, 100 μm thick Si coatings were prepared by RF magnetron sputtering on RB-SiC substrates of 70 mm diameter and then polished. Tests with ZYGO surface profilometer show that the RMS surface roughness of the surface-modified RB-SiC achieves 0. 496 nm. X-ray diffraction analyses reveal the polycrystalline structure of the Si coatings. Moreover, the adhesion between Si coating and RB-SiC substrate measured by direct pull-off method is more than 10. 7 MPa. Therefore, the magnetron sputtered Si coating can satisfy the requirements of RB-SiC surface modification.关键词
RB-SiC/射频磁控溅射/表面改性/表面粗糙度Key words
reaction bonded silicon carbide/ RF magnetron sputtering/ surface modification/ surface roughness分类
数理科学引用本文复制引用
苑永涛,刘红,邵传兵,陈益超,方敬忠..RB-SiC表面改性Si涂层的制备与性能[J].强激光与粒子束,2011,23(5):1281-1284,4.基金项目
中国科学院光电技术研究所领域前沿部署课题(C09K007) （C09K007）
