强激光与粒子束2011，Vol.23Issue(3)：647-651,5.DOI:10.3788/HPLPB20112303.0647
等离子体诊断用18.2nm Schwarzschild显微镜
18.2 nm Schwarzschild microscope for plasma diagnosis
摘要
Abstract
A Schwarzschild microscope at 18.2 nm for ultra-fast laser produced plasma diagnosis is developed. According to the requirements of plasma diagnosis, the microscope is designed for numerical aperture of 0. 1 and magnification of 10. It is found that spatial resolution of the designed objective achieves 1 250 lp/mm within the field of ± 1 mm with respect to the calculation of modular transfer function. Based on the working wavelength and incidence angle of light, the Mo/Si multilayer film with period of 9. 509 nm and layer number of 30 is designed and the coatings are deposited with magnetron sputtering. The reflectivity of the developed optical elements at 18.2 nm is about 30％. In order to demonstrate the resolution of microscope, a 24 lp/mm copper grid backlit by laser produced plasma is imaged via the Schwarzschild microscope on CCD. The result shows a resolution of 3 μm at the center field and 5 μm in 600 μm field, which can meet the requirement of laser produced plasma diagnosis.关键词
Schwarzschild显微镜/激光等离子体/Mo/Si多层膜/空间分辨力Key words
Schwarzschild microscope/ laser produced plasma/ Mo/Si multilayers/ spatial resolution分类
数理科学引用本文复制引用
王新,曹磊峰,谷渝秋,穆宝忠,黄怡,翟梓融,伊圣振,蒋励,朱京涛,王占山,刘红杰..等离子体诊断用18.2nm Schwarzschild显微镜[J].强激光与粒子束,2011,23(3):647-651,5.基金项目
国家自然科学基金项目(10825521,10773007) （10825521,10773007）
上海市科学技术委员会科研计划项目(0952nm06900) （0952nm06900）
