四川大学学报（自然科学版）2011，Vol.48Issue(2)：395-399,5.DOI:10.3969/j.issn.0490-6756.2011.02.027
电子束蒸发制备碳化硼微球涂层的工艺研究
Process of boron carbide micro-shell coatings deposited by electron beam evaporation
摘要
Abstract
A 3D system of deposition was designed and used to deposit boron carbide micro-shell coatings with electron beam evaporation. The coatings were deposited with the mandrel of marbles whose diameters are lmm. The effect of the vibration frequency of screen and preparation process of electron beam on the deposition rate, and the thickness and roughness of coatings were investigated. The thickness and components of coatings were measured by X-ray radiography and X-ray photoelectron spectroscopy (XPS), respectively. The surface roughness of coating was characterized by atomic force microscope (AFM). The results reveal that the main ingredients of the coatings are B4C and the surfaces of the coatings are quite smooth and homogeneous. The surface topography of the coatings are optimum at the vibration frequency of screen is 0.25Hz, vacuum under 3 × 10-3 Pa, high pressure being 6 kV and beam current from 100 mA to 120 mA.关键词
电子束蒸发/涂层/沉积时间Key words
electron beam evaporation/ coatings/ deposition time分类
数理科学引用本文复制引用
陶勇,廖志君,王自磊,范强,伍登学,卢铁城..电子束蒸发制备碳化硼微球涂层的工艺研究[J].四川大学学报（自然科学版）,2011,48(2):395-399,5.基金项目
国家自然科学基金基础科学人才培养基金(J0830308) （J0830308）
