光学精密工程2011，Vol.19Issue(3)：520-528,9.DOI:10.3788/OPE.20111903.0520
用非零位补偿法检测大口径非球面反射镜
Measurement of large aspheric mirrors by non-null testing
摘要
Abstract
Circular Subaperture Stitching Interferometry (CSSI) and Annular Subaperture Stitching Interferometry(ASSI) were expounded to realize the test of large aspheric surfaces without the null optics. The theories and principle of the technique were analysised,and the synthetical optimization stitching model and an effective stitching algorithm were established based on homogeneous coordinate transformation and simultaneous least-squares fitting. The softwares of CSSI and ASSI were devised,respectively, then the experiment was carried out for a φ350 mm hyperboloid by CSSI, ASSI and a null test, respectively. Experiments show that the differences of PV and RMS errors between null test and CSSI are 0.03lλ and 0. 004λ, and those between null test and ASSI are 0. 028λ and 0. 006λ, respectively,while their synthesized surface maps are consistent to the entire surface map from the null test. The technique proposed in this paper provides another quantitive measurement for testing large aperture aspheres besides the null-compensation method.关键词
光学检测/圆形子孔径拼接干涉/环形子孔径拼接干涉/大口径非球面/最小二乘拟合Key words
optical testing/ Circular Subaperture Stitching Interferomerty(CSSI)/ Annular Subaperture Stitching Interferometry(ASSI) ； large aspheric surface/ least-squares fitting分类
化学化工引用本文复制引用
王孝坤,王丽辉,邓伟杰,郑立功..用非零位补偿法检测大口径非球面反射镜[J].光学精密工程,2011,19(3):520-528,9.基金项目
国家863高技术研究发展计划资助项目(No.O8663NJ090) （No.O8663NJ090）
中国科学院长春光学精密机械与物理研究所三期创新基金重点资助项目(No.O83Y32J080) （No.O83Y32J080）
