现代科学仪器Issue(1)：15-18,4.
基于PSD的孔径测量系统设计
Design of Inradius Measuring System Based on PSD
摘要
Abstract
In order to adapt the modem manufacture and the measurement on the product line, it comes out with a measuring system design which uses position sensitive detector (PSD) and laser triangulation to actualize the non-contact measurement of inradius .It analyses the operational principle of PSD, measuring principle of the system, principle of the circuit and parameter of circuit elements, and actualizes the picking-up, magnifying, and conversion of the weak signal.The measuring range of the system is 1mm, and there is a normative inradius apparatus , which inradius is 90mm and machining resolution is 1um, being used to verify the sensor.The experiment data indicate that the measuring precision of the system is higher than 5％.关键词
激光三角法/内径测量/位置敏感探测器/跨阻放大器Key words
Laser triangulation/lnradius measurement/Position sensitive detector(PSD)/Transimpedence Amp分类
信息技术与安全科学引用本文复制引用
林力,邾继贵,王仲,刘常杰..基于PSD的孔径测量系统设计[J].现代科学仪器,2011,(1):15-18,4.基金项目
基于激光/CCD 原理的汽车精密耦件自动化检测共性枝术研究(2009ZX04014-092) （2009ZX04014-092）
863计划(2008AA042407) （2008AA042407）
