红外技术2011，Vol.33Issue(2)：80-84,5.
溶胶-凝胶法制备Al3+掺杂ZnO薄膜的结构和光学性能
Structural and Optical Properties of Aluminum-doped ZnO Thin Films Prepared by Sol-Gel Method
摘要
Abstract
ZnO:Al thin films were prepared on the glass substrates by the Sol-Gel method.The effects of different Al3+ dopant concentration and the annealing temperature on the structural and optical properties of ZnO:Al films were studied by using X-ray diffraction(XRD), UV-Vis transmittance spectrum and scanning electron microscope.The results indicated that the ZnO:Al thin films have a preferred c-axis (002) orientation perpendicular to the substrates.With increasing the annealing temperature or adding proper Al3+ dopant concentration ,the intensities of the XRD diffraction peaks and the grain size increased, while the values of FWHM decreased.The thin films also have the high visible transmittance of ＞80％.It was demonstrated that the high quality ZnO:Al films can be prepared by properly controlling the annealing temperature and the Al3+ dopant concentration.关键词
ZnO:Al薄膜/紫外-可见光透射光谱(UV-Vis transmittance spectrum)/扫描电镜(SEM)Key words
ZnO:Al thin films/ Uv-Vis transmittance/ SEM分类
信息技术与安全科学引用本文复制引用
宋立媛,唐利斌,姬荣斌,陈雪梅,刘新近,庄继胜,王茺,杨宇..溶胶-凝胶法制备Al3+掺杂ZnO薄膜的结构和光学性能[J].红外技术,2011,33(2):80-84,5.基金项目
兵器支撑项目 （）
