光学精密工程2011，Vol.19Issue(2)：213-220,8.DOI:10.3788/OPE.20111902.0213
用于激光器的电感储能发生器
Generator with inductive energy storage for laser application
摘要
Abstract
Generators with Inductive Energy Storage (GIES) are developed for laser applications. Discharge and laser parameters in high-pressure gas mixtures are studied. It is shown that the IES generator produces a high-voltage pre-pulse and the sharp increase of discharge current, which allows to form a long-lived stable discharge in different gas mixtures. Therewith the pre-pulse parameters can be easily controlled and optimized for each gas mixture. Without the IES breakdown voltage and amplitude of the first discharge, the current spike decreases by a factor of 1.5-2 and results in pure laser parameters. The maximal radiation power, output energy and the laser pulse duration of g N2 laser are obtained. The UV output is as high as 50 mJ in 40 ns pulse duration (FWHM), while that on the IR transition exceeds 25 mJ. The cascade lasing on N2 molecule transitions is achieved. As a result,the total pulse duration on the C3∏u- B3∏g band is extended up to 100 ns. The improvement of both pulse duration and output energy are achieved for XeC1, XeF and KrF excimer lasers. The maximal efficiency of XeF laser is as high as 1.6 ％, while peak output is 0.85 J and maximal pulse duration exceeds 200 ns. Up to 650 mJ in a 160 ns pulse is obtained at 248 nm by the discharge KrF laser with the efficiency of 3.3％. Finally, HF(DF) non-chain lasers with ultimate efficiency of 7. 7-10％ are developed,and the efficient operation on CO2 molecules with high peak power is demonstrated. The laser output at 10 600 nm is 6.2 J with the efficiency up to 25％.关键词
电感储能发生器/高压气体体放电/激光参数Key words
Generator with Inductive Energy Storage(GIES) / volume discharge in high pressure gas/laser parameter分类
信息技术与安全科学引用本文复制引用
TARASENKO V F,PANCHENKO A N,TEL'MINOV A E,GENIN D E..用于激光器的电感储能发生器[J].光学精密工程,2011,19(2):213-220,8.基金项目
Supported by the Russian Foundation for Basic Research (Grants No.10-08-00556-a and No.09-08-00030-a) （Grants No.10-08-00556-a and No.09-08-00030-a）
