传感技术学报2011，Vol.24Issue(3)：350-353,4.DOI:10.3969/j.issn.1004-1699.2011.03.008
面向三维实体建模的MEMS设计方法
A 3D Solid Modeling Oriented MEMS Design Approach*
摘要
Abstract
Driven by the “What You See Is What You Get" design concept ,this paper presents a 3D solid modeling oriented MEMS design approach which ensures a design flow from 3D solid model to system-level model and process layout. In this design flow, the 3 D solid model is firstly constructed, after FEA simulation, the system-level model can be obtained via component mapping and macro-model extraction, also obtained is the layout through automatic layout conversion.This design approach enhances the design efficiency ,and the consistency and accuracy of model data can be assured.关键词
MEMS/三维实体建模/设计方法Key words
MEMS /3D solid modeling /design approach分类
信息技术与安全科学引用本文复制引用
滕云,苑伟政,常洪龙..面向三维实体建模的MEMS设计方法[J].传感技术学报,2011,24(3):350-353,4.基金项目
国家高技术研究发展计划项目(2009AA04Z320) （2009AA04Z320）
