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Photoelectric properties of ITO thin films deposited by DC magnetron sputtering*OACSCDCSTPCDEI

Photoelectric properties of ITO thin films deposited by DC magnetron sputtering*

英文摘要

As anti-reflecting thin films and transparent electrodes of solar cells, indium tin oxide (ITO) thin films were prepared on glass substrates by DC magnetron sputtering process. The main sputtering conditions were sputtering power, substrate temperature and work pressure. The influence of the above sputtering conditions on the transmittance and conductivity of the deposited ITO films was investigated. The experimental results show that,the transmittance and t…查看全部>>

Liu Wei;Cheng Shuying

ITO thin films DC magnetron sputtering optical properties electrical properties

ITO thin films DC magnetron sputtering optical properties electrical properties

《半导体学报》 2011 (1)

SnS薄膜的掺杂改性及其在太阳电池上的应用

17-20,4

Project supported by the National Natural Science Foundation of China(No.61076063) and the Fujian Provincial Natural of Science Foundation of China(No.2009J01285).

10.1088/1674-4926/32/1/013002

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