Photoelectric properties of ITO thin films deposited by DC magnetron sputtering*OACSCDCSTPCDEI
Photoelectric properties of ITO thin films deposited by DC magnetron sputtering*
As anti-reflecting thin films and transparent electrodes of solar cells, indium tin oxide (ITO) thin films were prepared on glass substrates by DC magnetron sputtering process. The main sputtering conditions were sputtering power, substrate temperature and work pressure. The influence of the above sputtering conditions on the transmittance and conductivity of the deposited ITO films was investigated. The experimental results show that,the transmittance and t…查看全部>>
Liu Wei;Cheng Shuying
ITO thin films DC magnetron sputtering optical properties electrical properties
ITO thin films DC magnetron sputtering optical properties electrical properties
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17-20,4
Project supported by the National Natural Science Foundation of China(No.61076063) and the Fujian Provincial Natural of Science Foundation of China(No.2009J01285).
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