人工晶体学报2011,Vol.40Issue(2):352-358,7.
快速制备单晶Si片绒面的研究
Research on Rapid Surface Texturization of Monocrystalline Silicon
摘要
Abstract
Surface texturization of monocrystalline silicon for solar cells has been a mature technique, but it costs too long time. In order to improve productive efficiency, the effect of temperature, duration of time, composition and removment of the surface damages on surface texturization in the NaOH/IPA solution with shorter time was studied. Well-proportioned texturisation were obtained in 2.5% NaOH and 10% IPA aqueous solution at 80 ℃ for 15 min. The texturization is better when adding 3% Na2SiO3 in the solution, and the lowest reflectivity could be 9.5%. But it is hard to obtain perfect texturization after removing surface damages. The work using other additives (1, 4-Cyclohexanediol, CHX and Sodium dodecylbenzene sulfonate, SDBS) instead of IPA were studied, and IPA are still considered to be the most suitable additive.关键词
各向异性腐蚀/太阳电池/制绒/单晶SiKey words
anisotropic etching/ solar cells/ texturing/ monocrystalline silicon分类
能源科技引用本文复制引用
吴文娟,张松,韩培育,覃榆森,季静佳,顾晓峰,李果华..快速制备单晶Si片绒面的研究[J].人工晶体学报,2011,40(2):352-358,7.基金项目
教育部留学回国人员科研启动基金教外司留([2008]890) ([2008]890)