表面技术2011，Vol.40Issue(2)：55-57,61,4.
316L不锈钢表面沉积类金刚石膜的拉曼光谱分析及润湿性研究
Raman Spectra and Wettability Analysis of DLC Films Deposited on 316L Stainless Steel
摘要
Abstract
Diamond-like carbon (DLC) films were deposited on 316L stainless steel by plasma enhanced chemical vapor deposition (PECVD) under different deposition pressure and radio frequency power. The deposited films were characterized by Raman spectra. The results show that the deposited films have typical structure of DLC films. sp3 content in deposited films is different under various process parameters, and decreases with deposition pressure when radio frequency power is 100 W. The contact angle test results show that the contact angle of 316L stainless steel with normal saline and deionized water all increase after DLC films deposition, and the wettability decreases.关键词
316L不锈钢/类金刚石膜/拉曼光谱/润湿性Key words
316L stainless steel/ DLC films/ raman spectra/ wettability分类
矿业与冶金引用本文复制引用
孙建华,刘金龙,王庆良,吴高峰..316L不锈钢表面沉积类金刚石膜的拉曼光谱分析及润湿性研究[J].表面技术,2011,40(2):55-57,61,4.基金项目
清华大学摩擦学国家重点实验室开放基金资助项目(SKLTKF08A01) （SKLTKF08A01）
