烟台大学学报（自然科学与工程版）2011，Vol.24Issue(2)：136-140,5.
高灵敏度光伏硅杂质元素分析仪的研制
Application of SoG-Si Impurities Analyzer in SoG-Si
摘要
Abstract
The solar-grade silicon impurities element analyzer is a X-fluorescence analyzer based on the princi ple of the energy dispersive X-Ray fluorescence, which is composed of silicon drift detector and digital pulse processor as well as double-target activation system. In the performance measurement of solar-grade silicon im purities element analyzer, the energy deviation is 130 eV , the relative range is 0.06％, the relative standard deviation is 0.59％ , and the full width at half maximum of the silicon drift detector is 130 eV. It is demon strated that the solar-grade silicon impurities element analyzer can meet the requirements of solar-grade sili con. Also, the measurement of solar-grade silicon is accordance with the inductively coupled plasma mass spectrometry.关键词
元素分析仪/X荧光分析仪/光伏硅/硅漂移探测器/数字脉冲处理器Key words
element analyzer/ X-ray fluorescence analyzer/ solar-grade silicon/ silicon drift detector/ digital pulse processor分类
机械制造引用本文复制引用
宁方敏,邬旭然,田宇紘,徐惠忠..高灵敏度光伏硅杂质元素分析仪的研制[J].烟台大学学报（自然科学与工程版）,2011,24(2):136-140,5.基金项目
山东省自然科学基金资助项目(Y2008E05). （Y2008E05）
