现代科学仪器Issue(2)：49-52,4.
基于单频激光干涉仪的精密工件台定位系统设计
Design of Positioning System for Precision Stage Based on Single-frequency Laser Interferometer
王蕴 1薛虹 2韩立1
作者信息
- 1. 中国科学院电工研究所,北京,100190
- 2. 中国科学院研究生院,北京,100190
- 折叠
摘要
Abstract
Laser interferometer makes use of Michelson interference theory measuring displacement based on the length of the He-Ne laser at steady frequency.In recent years, laser interferometer has been used as precision measurement tool for precision machining and precision stage positioning.This paper introduces a precision stage positioning system based on single-frequency laser interferometer.This positioning system used single frequency laser interferometer as the measurement instrument , one 8-bit microcontroller as the micro control unit for processing data, and VC++ as the coding language for developing the control software.The experiments demonstrated that our positioning system is fast and precise and its minimum resolution is 38.6pm in theory.关键词
单频激光干涉仪/精密工件台/精密定位Key words
Single-frequency Laser Interferometer/ Precision Stage/ Precision Positioning分类
机械制造引用本文复制引用
王蕴,薛虹,韩立..基于单频激光干涉仪的精密工件台定位系统设计[J].现代科学仪器,2011,(2):49-52,4.
