南京大学学报（自然科学版）2011，Vol.47Issue(2)：218-226,9.
溅射与水热混合法制备ZnO纳米结构薄膜的异常光致发光特性
Anomalous photoluminescence spectra of nano-structural ZnO films prepared by mixed sputtering and hydrothermal methods
摘要
Abstract
ZnO thin films with different nanostructures are prepared, in which a mixed process involving two main steps is adopted.First, the seed layers are deposited by RF magnetron sputtering, and then,the nano-struetural films are grown by hydrothermal synthesis on the basis of deposited ZnO seed layers.The crystallographic studies of the ZnO thin films are carried out by X- ray diffraction ( XRD), which show that only one strong peak of ( 002 ) wurtzite-type phase zinc oxide, no diffraction peaks for impurities are found.The surface morphologies are visualized using scanning electron microscopy ( SEM)and reveal that the surface morphologies of the ZnO thin films obtained by different hydrothermal treatments are different: one kind is with nanorods perpendicularly grown on the substrates, and the another is with nanosheets petal-likely distributed on the substrate surfaces, although the ZnO seed layers are all with continuous and compact structure.The chemical natures of the ZnO thin films are characterized by X-ray photoelectron spectroscopy (XPS), which indicate that the ratio of O to Zn in lattice of ZnO is close to “l” for sputtered seed layers, while for nano-struetural ZnO thin films, the concentrations of latticed oxygen are scarce obviously, illustrating many oxygen-related defects exist.Finally, the room-temperature photoluminescence ( PL) measurements of the prepared ZnO thin films are performed.The PL spectra of the nano-structural films display anomalous characteristics including a broad and strong orange-red emission band, which can be seen by naked-eyes.Therefore, the mixed method supplies a simple, inexpensive and effective method to fabricate excellent orange-red luminescence materials.The anomalous broad and strong emission band can be attributed to the oxygen vacancy defects.关键词
ZnO纳米结构薄膜/射频磁控溅射/水热合成/光致发光谱Key words
nano-structural ZnO film/ RF magnetron sputtering/ hydrothermal synthesis/photoluminescence spectrum分类
数理科学引用本文复制引用
王艳,张淑仪,周凤梅,杨跃涛..溅射与水热混合法制备ZnO纳米结构薄膜的异常光致发光特性[J].南京大学学报（自然科学版）,2011,47(2):218-226,9.基金项目
National Natural Science Foundation of China (10774074) （10774074）
