中国机械工程2011，Vol.22Issue(4)：394-397,4.
基于多目标遗传算法的硅微机械电容式麦克风优化设计
Optimal Design of Micromachined Silicon Condenser Microphone Based on Multi-objective Genetic Algorithm
摘要
Abstract
A new approach to design micromachined condenser microphone based on multi-objective genetic algorithm was proposed. The parameters of the sandwich diaphragm and the backplate as well as the space among them as the design variables,and the sensitivity and the pull-in voltage and the frequency bandwidth were optimized. A Pareto-optimal set was obtained by multi-objective genetic algorithms. The set,in accordance with demands of design mostly was chosen as the parameters of microphone from the Pareto-optimal set.关键词
硅微机械电容式麦克风/多目标优化/遗传算法/Pareto最优解集Key words
silicon condenser micromachined microphone/ multi- objective optimal design/ genetic algorithm/ Pareto- optimal set分类
信息技术与安全科学引用本文复制引用
董健,王伟,计时鸣..基于多目标遗传算法的硅微机械电容式麦克风优化设计[J].中国机械工程,2011,22(4):394-397,4.基金项目
浙江省自然科学基金资助项目(Y107445) （Y107445）
浙江省重中之重学科开放基金资助项目(20060313) （20060313）
