物理学报2011，Vol.60Issue(3)：515-522,8.
Co离子注入TiO2薄膜的显微结构和磁性研究
Microstructure and magnetic properties of the cobalt ions implanted TiO2 films
摘要
Abstract
TiO2 thin films were prepared by direct current magnetron sputtering on glass substrates, then were implanted by cobalt ions, and finally annealed at 500 ℃ for 50 min. Specimens for transmission electron microscopy were prepared by peeling-scattering technology, and were observed in situ by scanning electron microscopy (SEM), energy dispersive X-ray (EDX) and high resolution transmission electron microscopy (HRTEM). The films were identified as anatase structure.The Co ions exist mainly in a thin layer beneath the surface of the films. The implanted Co ions damage the TiO2 crystals and some of them exist as CoO. The annealing treatment could repair the TiO2 grains and make the Co ions diffuse into the TiO2 lattice. The vibrating sample magnetometer (VSM) measurements show that the Co ion implanted TiO2 films are ferromagnetic at room temperature and the annealing treatment in vacuum could enhance the ferromagnetism, which could be explained within the scope of the BMP theory.关键词
Co注入TiO2薄膜/电镜原位观察/室温铁磁性Key words
cobalt ions implanted TiO2 films/ in-situ observation by HRTEM and SEM/ room temperature ferromagnetism引用本文复制引用
丁芃 ,刘发民,杨新安,李建奇..Co离子注入TiO2薄膜的显微结构和磁性研究[J].物理学报,2011,60(3):515-522,8.基金项目
北京航空航天大学博士研究生创新基金(批准号:292122)资助的课题. （批准号:292122）
