物理学报2011，Vol.60Issue(3)：523-529,7.
氧分压对Mg掺杂ZnO薄膜结晶质量和光学特性的影响
Influence of oxygen partial pressure on the crystal quality and optical properties of Mg-doped ZnO films
摘要
Abstract
Zn1-x Mgx O films have been deposited on Al2O3 (0001) substrates at different oxygen pressures by using pulsed laser deposition method. The influence of oxygen pressure on the crystal quality and optical properties of the films is studied with X-ray diffraction (XRD), transmittance spectra, and photoluminescence (PL). It is found that the crystal quality of the films lowers with increasing of oxygen pressure from 10-4 Pa to 10 Pa. At the pressure of 10-4 Pa, the epitaxial relationship between the film and sapphire substrate is determined to be ZnMgO (0001)// Al2O3 (0001) ,ZnMgO[ 10-1 0]//Al2O3[ll-20]. In the oxygen rich environment, however, another epitaxial relationship, ZnMgO (0001)//Al2O3 (0001) and ZnMgO[10-10]//Al2O3[10-10], is also present in the films, which is suggested to be responsible for the decline of the crystal quality. Compared with pure ZnO films, the UV peak of Zn1-xMgxO alloys shows red-shift from 3. 374 to 3. 332 eV with increasing oxygen working pressure increasing from 10-4 Pa up to 10 Pa. The difference in redshifts can be attributed to the decrease of Mg content in the films resulting from the variation of oxygen pressure. A broad UV PL spectrum was observed at 10 K in the films deposited under different pressures and can be decomposed into two recombination processes of excitons, corresponding to the bound and the localized exciton luminescence, respectively. The binding energy of bound excitons in the ZnMgO films is larger than that in pure ZnO and has an increasing trend with increasing oxygen pressure.关键词
ZnO/Mg掺杂/脉冲激光沉积/薄膜生长/光学特性Key words
ZnO/ Mg doped/ pulsed laser deposition/ thin film growth/ optical property引用本文复制引用
鲍善永,董武军,徐兴,栾田宝,李杰,张庆瑜..氧分压对Mg掺杂ZnO薄膜结晶质量和光学特性的影响[J].物理学报,2011,60(3):523-529,7.基金项目
国家自然科学基金(批准号:10774018)和国家重点基础研究发展计划(批准号:2007CB616902)资助的课题. （批准号:10774018）
