计算机应用研究2011，Vol.28Issue(6)：2055-2056,2069,3.DOI:10.3969/j.issn.1001-3695.2011.06.014
半导体制造设备预维修调度的知识进化算法研究
Research on knowledge evolution algorithm for semiconductor manufacturing equipment predicted maintenance scheduling
摘要
Abstract
This paper researched the method based on knowledge evolution algorithm to solve the problem of semiconductor manufacturing equipment predicted maintenance scheduling. It illustrated the detailed realization of the method, and computed the example of other literatures. By comparison of the result, it can be found that the proposed algorithm illustrates its higher searching efficiency than the particle swarm optimization algorithm and first in first out(FIFO) method of other literatures.关键词
半导体/制造设备/预维修调度/知识进化算法Key words
semiconductor/ manufacturing equipment/ predicted maintenance scheduling/ knowledge evolution algorithm分类
管理科学引用本文复制引用
张爽,马慧民,马良,许圣良..半导体制造设备预维修调度的知识进化算法研究[J].计算机应用研究,2011,28(6):2055-2056,2069,3.基金项目
国家教育部人文社会科学研究基金资助项目(09YJC630152) （09YJC630152）
上海市教育委员会科研创新资助项目(09YS486) （09YS486）
