材料工程Issue(6)：81-86,98,7.
水平震荡机械研磨对酸性镀铜微观结构的影响
Effects of Horizontally Vibrating Mechanical Attrition on the Microstructure of Electrodeposition Cu Coatings
摘要
Abstract
The mechanical attrition (MA) was supplied in a traditional acid electroplating process of copper by the horizontal rolling and sliding of glass balls on the sample surface with a special vibrating frequency. The effects of vibrating frequency on the microstructure, grain refinement, deposition rate, porosity, as well as corrosion resistance in 3.5 ％ (mass fraction) NaCl solution of the mechanical attrition enhanced electroplating(MAEE) were analyzed by SEM, XRD and AutoLab. The results show that, compared with the traditional electroplated(TEP) Cu coating, significant grain refinement,reduced porosity and enhanced corrosion resistance are exhibited for the MAEE Cu coatings. When the vibrating frequency is arranged in 1.0-4.0Hz, the change of frequencies has no obvious influence on the grain refinement of MAEE coatings. And when the frequency is set to 2. 0Hz or 3.0Hz, due to the inhomogeneous MA of the balls, the properties of MAEE Cu coatings are inferior to those prepared at 1.0-4.0Hz, but still much better than TCP coating. The mechanism of horizontal vibrating frequency on the MAEE process was discussed.关键词
机械研磨/电沉积/铜镀层/水平震荡/结构/耐蚀性Key words
mechanical attrition/ electrodeposition/ Cu coating/ horizontally vibrating/ microstructure / corrosion resistance分类
化学化工引用本文复制引用
冯长杰,杜楠,王春霞,何业东..水平震荡机械研磨对酸性镀铜微观结构的影响[J].材料工程,2011,(6):81-86,98,7.基金项目
江西省自然科学基金资助项目(2008GQC0038) （2008GQC0038）
无损检测技术教育部重点实验室资助项目(ZD200729008) （ZD200729008）
