半导体学报2011，Vol.32Issue(5)：18-21,4.DOI:10.1088/1674-4926/32/5/053002
Effects of vacancy structural defects on the thermal conductivity of silicon thin films
Effects of vacancy structural defects on the thermal conductivity of silicon thin films
摘要
关键词
molecular dynamics simulation/vacancy defects/thermal conductivity/siliconKey words
molecular dynamics simulation/vacancy defects/thermal conductivity/silicon引用本文复制引用
Zhang Xingli,Sun Zhaowei..Effects of vacancy structural defects on the thermal conductivity of silicon thin films[J].半导体学报,2011,32(5):18-21,4.基金项目
Project supported by the Program for Changjiang Scholars and Innovative Research Team in University of Ministry of Education of China (No.IRT0520). （No.IRT0520）
