人工晶体学报2011，Vol.40Issue(3)：594-598,5.
离子液体辅助溶胶-凝胶法制备ZnO:Al透明导电薄膜及其光电性能研究
Photoelectric Properties of ZnO: Al Transparent Conductive Films Prepared by Ionic Liquids Assisted Sol-gel Method
赵金博 1吴莉莉 2邹科 1于伟燕 2李高增1
作者信息
- 1. 山东大学材料液固结构演变与加工教育部重点实验室,济南250061
- 2. 山东大学材料科学与工程学院,济南250061
- 折叠
摘要
Abstract
Transparent conductive ZAO films were prepared by sol-gel method on glass substrates assisted by ionic liquid. The effect of A1 doping concentration on the microstructures, optical and electrical properties of the films were investigated by X-ray diffraction ( XRD), field-emission scanning electron microscope and Hall effect measurement system. The results show that the samples are not grown along (002) direction. As the Al concentration increasing, the films grow more preferentially along the (002)direction and the average grain size gradually changes from flake to sphere. The resistivity of the thin film increases first and then decreases as the A1 concentration increasing. The following study indicated that the resistivity decreases obviously when the films were annealed under NH3. The average transmittance of the films is more than 80％ and the minimum resistivity is 4.7 × 10-2 Ω · cm when the A1 concentration is 1 mol％.关键词
透明导电薄膜/ZAO薄膜/离子液体/溶胶-凝胶/光电性能Key words
transparent conductive film/ ZAO thin film/ ionic liquids/ sol-gel method/ photoelectric property分类
数理科学引用本文复制引用
赵金博,吴莉莉,邹科,于伟燕,李高增..离子液体辅助溶胶-凝胶法制备ZnO:Al透明导电薄膜及其光电性能研究[J].人工晶体学报,2011,40(3):594-598,5.
