半导体学报2009，Vol.30Issue(11)：88-93,6.DOI:10.1088/1674-4926/30/11/115003
Noise and mismatch optimization for capacitive MEMS readout
Noise and mismatch optimization for capacitive MEMS readout
摘要
Abstract
This paper presents a high precision CMOS readout circuit for a capacitive MEMS gyroscope. A continuous time topology is employed as well as the chopper noise cancelling technique. A detailed analysis of the noise and mismatch of the capacitive readout circuit is given. The analysis and measurement results have shown that thermal noise dominates in the proposed circuit, and several approaches should be used for both noise and mismatch optimization. The circuit chip operates under a single 5 V supply, and has a measured capacitance resolution of 0.2 aF/√Hz. With such a readout circuit, the gyroscope can accurately measure the angular rate with a sensitivity of 15.3 mV/°/s.关键词
high precision/ readout/ capacitive MEMSKey words
high precision/ readout/ capacitive MEMS分类
数理科学引用本文复制引用
Zhang Chong,Wu Qisong,Yin Tao,Yang Haigang..Noise and mismatch optimization for capacitive MEMS readout[J].半导体学报,2009,30(11):88-93,6.基金项目
Project supported by the National High Technology Research and Development Program of China (Nos. 2007AA04Z349, 2008AA010710). （Nos. 2007AA04Z349, 2008AA010710）
