半导体学报2010，Vol.31Issue(6)：16-21,6.DOI:10.1088/1674-4926/31/6/063002
A novel compensation method for polygonized mesa structures on (100) silicon substrate
A novel compensation method for polygonized mesa structures on (100) silicon substrate
Zhang Han 1Li Weihua1
作者信息
- 1. Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
- 折叠
摘要
关键词
(100) substrate/compensation method/polygonized mesa structure/simulation result/experimental resultKey words
(100) substrate/compensation method/polygonized mesa structure/simulation result/experimental result引用本文复制引用
Zhang Han,Li Weihua..A novel compensation method for polygonized mesa structures on (100) silicon substrate[J].半导体学报,2010,31(6):16-21,6.
