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Erase voltage impact on 0.18μm triple self-aligned split-gate flash memory endurance

Dong Yaoqi Kong Weiran Nhan Do Wang Shiuh-Luen Lee Gabriel

半导体学报2010,Vol.31Issue(6):74-77,4.
半导体学报2010,Vol.31Issue(6):74-77,4.DOI:10.1088/1674-4926/31/6/064012

Erase voltage impact on 0.18μm triple self-aligned split-gate flash memory endurance

Erase voltage impact on 0.18μm triple self-aligned split-gate flash memory endurance

Dong Yaoqi 1Kong Weiran 2Nhan Do 3Wang Shiuh-Luen 2Lee Gabriel4

作者信息

  • 1. Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
  • 2. Grace Semiconductor Manufacturing Corporation,Shanghai 201203,China
  • 3. Graduate University of the Chinese Academy of Sciences,Beijing 100049,China
  • 4. Silicon Storage Technology Inc.,1171 Sonora Court,Sunnyvale,CA 94086,USA
  • 折叠

摘要

关键词

split-gate flash/endurance/erase voltage

Key words

split-gate flash/endurance/erase voltage

引用本文复制引用

Dong Yaoqi,Kong Weiran,Nhan Do,Wang Shiuh-Luen,Lee Gabriel..Erase voltage impact on 0.18μm triple self-aligned split-gate flash memory endurance[J].半导体学报,2010,31(6):74-77,4.

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