半导体学报2009，Vol.30Issue(10)：5-9,5.DOI:10.1088/1674-4926/30/10/102002
Observation of ferromagnetism in highly oxygen-deficient HfO_2 films
Observation of ferromagnetism in highly oxygen-deficient HfO_2 films
摘要
Abstract
Ferromagnetism in undoped and cobalt-doped high-κ HfO_2 films was investigated. No ferromagnetism was observed in stoichiometric HfO_2 films, but we observed weak ferromagnetism in highly oxygen-deficient HfO_2 films. Undoped and cobalt doped films were treated by alternate annealing in vacuum and oxygen atmospheres. From the experiments, both the lack of oxygen vacancies and the increase of oxygen species in bulk (e.g. interstitial oxy gen) will degrade the magnetic ordering. Additionally, it is believed that cobalt doping has no obvious relationship with the observed intrinsic d~0 magnetism.关键词
sputtering/ dielectrics/ high κ/ d~0 magnetism/ oxygen vacancyKey words
sputtering/ dielectrics/ high κ/ d~0 magnetism/ oxygen vacancy分类
信息技术与安全科学引用本文复制引用
Jiang Ran,Zhang Yan..Observation of ferromagnetism in highly oxygen-deficient HfO_2 films[J].半导体学报,2009,30(10):5-9,5.基金项目
Project supported by the Postdoctoral Science Foundation of China (No. 20080431176), the Special Fund for Postdoctoral Innovative Project of Shandong Province (No. 200702027), and the Doctoral Fund of Ministry of Education of China (No. 200804221006). （No. 20080431176）
