半导体学报2009，Vol.30Issue(10)：55-58,4.DOI:10.1088/1674-4926/30/10/104007
Experimental analysis of an MIM capacitor with a concave shield
Experimental analysis of an MIM capacitor with a concave shield
Liu Lintao 1Yu Mingyan 1Wang Jinxiang1
作者信息
- 1. Microelectronic Center, Harbin Institute of Technology, Harbin 150001, China
- 折叠
摘要
Abstract
A novel shielding scheme is developed by inserting a concave shield between a metal-insulator-metal (MIM) capacitor and the silicon substrate. Chip measurements reveal that the concave shield improves the quality factor by 11 % at 11.8 GHz and 14% at 18.8 GHz compared with an unshielded MIM capacitor. It also alleviates the effect on shunt capacitance between the bottom plate of the MIM capacitor and the shield layer. Moreover, because the concave shields simplify substrate modeling, a simple circuit model of the MIM capacitor with concave shield is presented for radio frequency applications.关键词
MIM capacitor/ concave shield/ quality factor/ modelKey words
MIM capacitor/ concave shield/ quality factor/ model分类
信息技术与安全科学引用本文复制引用
Liu Lintao,Yu Mingyan,Wang Jinxiang..Experimental analysis of an MIM capacitor with a concave shield[J].半导体学报,2009,30(10):55-58,4.
