传感技术学报2009，Vol.22Issue(11)：1557-1561,5.
微机电加速度计的六位置标定
Six-Position Testing of MEMS Accelerometer
宋丽君 1秦永元1
作者信息
- 1. 西北工业大学自动化学院,西安710072
- 折叠
摘要
Abstract
Accelerometer is the main component of Inertial Navigation System(INS) to measure the acceler-ation of a body. The accelerometer must be calibrated before the first time use, because the precision of ac-celerometer is the key factor to affect the precision of the Inertial Navigation System[1]. Six-position testing of Micro Electro Mechanical Systems (MEMS)accelerometer was designed to determine the parameters from the error model of MEMS accelerometer. The parameters are the scale factor of MEMS accelerome-ter,bias of MEMS accelerometer and error on installation of MEMS accelerometer. The parameters of MEMS accelerometer are encapsulated in the function of C for examination. The results of examination show that the way is simple to analyze on principle,easy to realize and the scale factor linearity of MEMS accelerometer has a good effect for the error model of MEMS accelerometer.关键词
惯性导航系统/MEMS加速度计/六位置标定/标度因数/安装误差/线性度Key words
inertial navigation system (INS)/MEMS accelerometer/six-position testing/scale factors/error of installation/nonlinearity分类
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宋丽君,秦永元..微机电加速度计的六位置标定[J].传感技术学报,2009,22(11):1557-1561,5.
