光学精密工程2009，Vol.17Issue(10)：2365-2370,6.
光学加工中高频误差对散射损失比的影响
Influence of mid-and-high frequency errors from optical processing on ratio of scattering loss
摘要
Abstract
In view of a primary mirror of an optical system,the influence of the mid-and-high frequency errors on the Ratio of Scattering Loss (RSL) was analyzed.On the basis of the statistical optics theory and Harvey-Shack scatter theory,a mathematical model of the relationshop between the Root-mean Square (RMSs) of mid-and-high frequency errors and the RSL was established by assuming the surface errors as a stationary Gaussian random process,and the numerical computation and actual surface profile data of the model were validated.It is found that the RSL increases almost in exponential form with the increase of RMS and the mathematical model agrees with the simulation results very well within the focused radius.The influence of the mid-and-high frequency errors on the RSL is less than 1% when the RMSs of the mid-and-high frequency errors are less than λ/63 respectively.The a-nalysis results provide the support for correction of the mid-and-high frequency errors.关键词
光学主镜/中频误差/高频误差/散射损失比/误差均方根Key words
optical primary mirror/mid-frequency error/high-frequency error/ratio of scattering loss/root-mean square分类
化学化工引用本文复制引用
戴一帆,吴冬良,王贵林..光学加工中高频误差对散射损失比的影响[J].光学精密工程,2009,17(10):2365-2370,6.基金项目
国家重大基础研究项目和国家自然科学基金资助项目(No.50775215) （No.50775215）
