红外与毫米波学报2009，Vol.28Issue(4)：246-248,3.
HgCdTe液相外延薄膜表面缺陷的控制
CONTROL OF SURFACE DEFECTS IN HgCdTe FILM GROWN BY LIQUID PHASE EPITAXY
摘要
Abstract
Liquid phase epitaxy is a developed technique for the growth of HgCdTe films.Two kinds of macro defects on the surface of HgCdTe film were studied.It was demonstrated that the origin of the void defects was related to the wax contamination on CdZnTe substrate, while the defects of hill-like were due to the CdZnTe particles detached from the edge of the CdZnTe substrate.Through the fine controlling during the substrate preparation, these two kinds of defects can be depressed and the high quality HgCdTe films with zero defect density can be obtained.关键词
碲镉汞/液相外延/表面缺陷Key words
HgCdTe/liquid phase epitaxy/surface defects分类
数理科学引用本文复制引用
魏彦锋,徐庆庆,陈晓静,张传杰,孙士文,方维政,杨建荣..HgCdTe液相外延薄膜表面缺陷的控制[J].红外与毫米波学报,2009,28(4):246-248,3.基金项目
国家自然科学基金(60876012,60606026)资助项目 （60876012,60606026）
