计量学报2009,Vol.30Issue(z1):160-163,4.DOI:10.3969/j.issn.1000-1158.2009.z1.041
步距规校准装置
Calibration System for Step Gauge
王为农 1裴丽梅 1任国营 1夏阳2
作者信息
- 1. 中国计量科学研究院,北京,100013
- 2. 北京市计量检测科学研究院,北京100029
- 折叠
摘要
Abstract
Combining coordinate measuring machine (CMM) with laser interferometer, a calibration system for step gauge is developed. It can provide calibration service for multi-size standard with high accuracy. The structure, principle and schematic diagram of the software are described, and the uncertainty analysis of the system is presented.关键词
计量学/校准装置/步距规/坐标测量机/激光干涉仪Key words
Metrology/Measurement system/Step gauge/Coordinate measuring machine/Laser interferometer分类
通用工业技术引用本文复制引用
王为农,裴丽梅,任国营,夏阳..步距规校准装置[J].计量学报,2009,30(z1):160-163,4.