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步距规校准装置

王为农 裴丽梅 任国营 夏阳

计量学报2009,Vol.30Issue(z1):160-163,4.
计量学报2009,Vol.30Issue(z1):160-163,4.DOI:10.3969/j.issn.1000-1158.2009.z1.041

步距规校准装置

Calibration System for Step Gauge

王为农 1裴丽梅 1任国营 1夏阳2

作者信息

  • 1. 中国计量科学研究院,北京,100013
  • 2. 北京市计量检测科学研究院,北京100029
  • 折叠

摘要

Abstract

Combining coordinate measuring machine (CMM) with laser interferometer, a calibration system for step gauge is developed. It can provide calibration service for multi-size standard with high accuracy. The structure, principle and schematic diagram of the software are described, and the uncertainty analysis of the system is presented.

关键词

计量学/校准装置/步距规/坐标测量机/激光干涉仪

Key words

Metrology/Measurement system/Step gauge/Coordinate measuring machine/Laser interferometer

分类

通用工业技术

引用本文复制引用

王为农,裴丽梅,任国营,夏阳..步距规校准装置[J].计量学报,2009,30(z1):160-163,4.

计量学报

OA北大核心CSCDCSTPCD

1000-1158

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