计量学报2009，Vol.30Issue(z1)：5-8,4.DOI:10.3969/j.issn.1000-1158.2009.z1.02
单频激光干涉仪条纹的偏振移相细分技术
The Polarization Phase-shifting Technology for Single-frequency Laser Interferometer Fringes Subdivision
摘要
Abstract
The polarization phase-shifting technology is put forward for the single-frequency laser interferometer fringes subdivision. Four laser interferometer signals which phase-difference followed by 90°can be obtained with the optical components. The "zero drift" problem of the light intensity can be solved by hardware circuit. The common optical path arrangement can effectively remove the error caused by environmental factors and increase the stability and repeatability of the interferometer system. Phase-shifting technology can not only fully use the light intensity, but also the four laser interferometer signals are easy to take count and distinguish the direction of the laser interferometer fringes. And this technology laid the foundation for further electronic subdivision.关键词
计量学/激光干涉仪/偏振移相/条纹细分Key words
Metrology/Laser interferometer/Polarization phase-shift/Fringes subdivision分类
通用工业技术引用本文复制引用
施玉书,高思田,卢明臻,杜华,崔建军..单频激光干涉仪条纹的偏振移相细分技术[J].计量学报,2009,30(z1):5-8,4.基金项目
公益性行业科研专项(2007GYJ001) （2007GYJ001）
